Equipment

Equipment for Device Fabrication

Fume hood : ADS Laminaire

Laser Exposure System : MLA150, Heidelberg Instruments

Reactive Ion Etching (RIE) System : PlasmaPro 80 Cobra, Oxford Instruments

Parylene Coater : PDS2010, Specialty Coating Systems

Defoaming Mixer : ARE-250, Thinky

Plasma Cleaner : PDC-002, Harrick Plasma

Numerical Control Machine : CHARLY dmc300, Meca Neumeric

Wire Bonder : Westbond

Equipment for Device Evaluation & Application

Field Emission Scanning Electron Microscope (FE-SEM) : Hitachi

Compact Scanning Electron Microscope (SEM) : TM3030Plus, Hitachi High-Technologies

Long Distance Microscope : Nikon

Digital Microscope : Keyence

Incubator attached Microscope : IX73, Olympus

Confocal Microscope : Zeiss

Cell Pickup System : UNIPICK+, NeuroInDx