---

 

 

Facilities

Cleanroom

 

Experimental room

 

Darkroom

---

 

 

Equipment

---

 

 

Equipment for Device Fabrication

Fume hood : ADS Laminaire

 

Laser Exposure System : MLA150, Heidelberg Instruments

 

Reactive Ion Etching (RIE) System : PlasmaPro 80 Cobra, Oxford Instruments

 

Parylene Coater : PDS2010, Specialty Coating Systems

 

Deforming Mixer : ARE-250, Thinky

 

Plasma Cleaner : PDC-002, Harrick Plasma

 

Numerical Control Machine : CHARLY dmc300, Meca Neumeric

 

Wire Bonder : Westbond

---

 

 

Equipment for Device Evaluation & Application

Field Emission Scanning Electron Microscope (FE-SEM) : Hitachi

 

Compact Scanning Electron Microscope (SEM) : TM3030Plus, Hitachi High-Technologies

 

Long Distance Microscope : Nikon

 

Digital Microscope : Keyence

 

Incubator attached Microscope : IX73, Olympus

 

Confocal Microscope : Zeiss

 

Cell Pickup System : UNIPICK+, NeuroInDx